2013/6/01

Yeedex has completely established the technology and processing line of high density plasma ceramic coating in Jun/2013 at Taiwan factory, technology transferred from Yeedex’s strategic partner Nihon Ceratec Co., Ltd, Japan. The high density ceramic layer coated on the chamber part has the strong plasma-resistance, especially suitable for the severe process condition for nano-width semiconductor tools. Orders in customer-made new parts or refurbished parts are welcome.

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